WebDisappearing anode results in a higher voltage for same oxygen partial pressure In DC, the target current changes when an additional clean anode is provided The disappearing … WebJan 3, 2006 · Long-term stability and disappearing anode effects during reactive DC and pulsed bipolar magnetron sputtering of Al2O3 2024, Vacuum Show abstract Al2O3 thin films deposition by reactive evaporation of Al in anodic arc with high levels of metal ionization 2024, Surface and Coatings Technology …
Advances In RF Sputtering - Aultimut
WebIn the disappearing anode effect, the plasma parameters and plasma uniformity change with time and, in the extreme, the plasma may not be sustainable and is … WebMar 19, 2024 · This phenomenon is also known as the disappearing anode effect. In this study, a new approach involving adding electrically conductive carbide ceramics was tried to prevent the electrical insulation of the anode and thereby guarantee process stability. Yttria-stabilized zirconia (3YSZ) with 30 vol.% titanium carbide (TiC) targets are used in a ... black white washcloth debate
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WebMar 15, 2024 · There are two main benefits of this dual magnetron sputtering system: (i) removal of arcing and hidden anode problems in single magnetron discharge [12], and (ii) reducing the working pressure needed for sustaining the discharge and thus enhance the ion energy transfer to the growing films [ [8], [9], [10], [11]]. WebThe loss of the anode will also require chamber maintenance to clean surfaces and restore the electrical continuity from the target to the anode. Accordingly, any means of establishing an... WebApr 14, 2024 · Both, AC/sine wave and bipolar pulse dual magnetron sputtering (see Figure 1, for comparison) are commonly used since they offer similar advantages such as similar duty cycle and mitigation of the “disappearing anode” effect. While both methods are theoretically comparable, they differ substantially in the hardware requirements. black white washed cabinets